Measuring thickness of gold evaporated onto silicon wafer

mardi 1 avril 2014

For this assignment, I need to design a lab procedure to measure the thickness and uniformity of a gold layer (on the order of 10 μm) that is evaporated onto a silicon wafer (or similar substrate). The results need to be within an accuracy of 10%, which is not super accurate.



I am having trouble coming up with the theory behind this experiment. At first, I thought it can simply be done using a microscope, but you would not be able to distinguish the layer of gold from the silicon layer. Is there some way to distinguish between the gold and silicon using their individual properties? Am I not seeing a formula or principle that can be used to aid in this measurement? I'm really stumped and would greatly appreciate any help.





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