Lithium fluoride (LiF) etching/patterning possible?

dimanche 3 novembre 2013

Does any of you know about Lithium fluoride (LiF) etching/patterning?



I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.



Thanks






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